Annealing of dielectric properties of GaAs Crystals Irradiated by Neutrons
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DOI:
https://doi.org/10.32523/2616-6836-2019-129-4-107-112Abstract
This article investigated capacitors with dielectrics of silicon and gallium arsenide irradiated with neutrons. The possible influence of various types of contacts (metal -semiconductor) on the capacitive properties of capacitors is analyzed. It is shown that GaAs layers compensated by
radiation defects can be used as insulation of integrated circuit elements