Imash , A., and S. Kunakov. “Monosilane SiH4 Plasma Kinetics Generated by E-Beam and electrons’ Energy Distribution Impact on Silicon Chemical Vapor Deposition”. BULLETIN OF THE L.N. GUMILYOV EURASIAN NATIONAL UNIVERSITY. PHYSICS. ASTRONOMY SERIES 135, no. 2 (June 30, 2022): 57–68. Accessed November 23, 2024. https://bulphysast.enu.kz/index.php/physast/article/view/55.